Chang Wan Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang Wan Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
2Very high frequency plasma reactant for atomic layer deposition
3Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
4In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
5Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization
6Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
7Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
8Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2