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The publication database currently has 1561 entries.
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193 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
242 Film and Plasma Characteristics
83 Theses

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Recent Database Additions
Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
Search 1561 plasma ALD publications by:
193 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
242 Film and Plasma Characteristics

Chang Wan Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang Wan Lee returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
2Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
3Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
4Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
5Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization
6In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
7Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
8Very high frequency plasma reactant for atomic layer deposition

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