Publication Information

Title:
Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Scientific Reports 7, Article number: 40091 (2016)
Date:
2016-12-01

Author Information

Name Institution
Hamin ParkKorea Advanced Institute of Science and Technology
Tae Keun KimKorea Advanced Institute of Science and Technology
Sung Woo ChoDNF Co. Ltd.
Hong Seok JangDNF Co. Ltd.
Sang-Ick LeeDNF Co. Ltd.
Sung-Yool ChoiKorea Advanced Institute of Science and Technology

Films

Plasma BN


Film/Plasma Properties

Substrates

Keywords

Notes

873