Publication Information

Title: Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition

Type: Journal

Info: Scientific Reports 7, Article number: 40091 (2016)

Date: 2016-12-01

DOI: http://dx.doi.org/10.1038/srep40091

Author Information

Name

Institution

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

DNF Co. Ltd.

DNF Co. Ltd.

DNF Co. Ltd.

Korea Advanced Institute of Science and Technology

Films

Plasma BN using Atomic Premium CN1

Deposition Temperature Range = 250-350C

0-0-0

7727-37-9

7664-41-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

873



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