Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


3EMAB, TEMAB, (EtMeN)3B, (C2H5CH3)N)3B, Tris(ethylmethylamido)borane, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition