Sang-Ick Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Ick Lee returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
2Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
3Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor