Your search for plasma enhanced atomic layer deposition publications discussing BN films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition|
|2||Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition|
|3||Low-Temperature Deposition of Hexagonal Boron Nitride Via Sequential Injection of Triethylboron and N2/H2 Plasma|
|4||Low-temperature sequential pulsed chemical vapor deposition of ternary BxGa1-xN and BxIn1-xN thin film alloys|
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