BN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing BN films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition