Publication Information

Title:
Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
Type:
Journal
Info:
ACS Appl. Mater. Interfaces 2015, 7, 2998-3002
Date:
2015-01-27

Author Information

Name Institution
Sanghoon JiSeoul National University
Gu Young ChoSeoul National University
Wonjong YuSeoul National University
Pei-Chen SuNanyang Technological University
Min Hwan LeeUniversity of California - Merced
Suk Won ChaSeoul National University

Films


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Substrates

AAO, Anodic Aluminum Oxide

Keywords

SOFC, Solid Oxide Fuel Cell

Notes

CN1 Atomic Premium PEALD YSZ for fuel cell electrolyte.
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