Inductively coupled plasma sources from Plasma ALD, LLC.


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Pei-Chen Su Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pei-Chen Su returned 1 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate