Publication Information

Title: Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells

Type: Journal

Info: CIRP Annals - Manufacturing Technology 65 (2016) 515-518

Date: 2016-06-01

DOI: http://dx.doi.org/10.1016/j.cirp.2016.04.079

Author Information

Name

Institution

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Films

Plasma YSZ using Atomic Premium CN1

Deposition Temperature = 250C

19756-04-8

329735-72-0

7782-44-7

Thermal ZrO2 using Atomic Premium CN1

Deposition Temperature = 250C

19756-04-8

7782-44-7

Thermal Y2O3 using Atomic Premium CN1

Deposition Temperature = 250C

329735-72-0

7782-44-7

Thermal YSZ using Atomic Premium CN1

Deposition Temperature = 250C

329735-72-0

19756-04-8

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Images

SEM, Scanning Electron Microscopy

Zeiss Ultra 55

Substrates

Keywords

SOFC, Solid Oxide Fuel Cell

Notes

927



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