Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Controlled erbium incorporation and photoluminescence of Er-doped Y2O3|
|2||Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells|
|3||Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure|
|4||Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals|
|5||Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition|
|6||Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides|
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