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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
2Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
3Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
4Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
5Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
6Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
7Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells