Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
2Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
3Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
4Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
5Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides


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