Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
2Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
3Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
4Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
5Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
6Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
7Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides