Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y2O3 films returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
2Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
3Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
4Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
5Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
6Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
7Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides