Publication Information

Title:
Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
Type:
Journal
Info:
APPLIED PHYSICS LETTERS 87, 011907 2005
Date:
2005-07-01

Author Information

Name Institution
Trinh Tu VanUniversity of California - Los Angeles (UCLA)
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Y2O3


Plasma Er2O3


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Optical Properties
Analysis: PL, PhotoLuminescence

Substrates

Si(100)

Keywords

Optical
Er-doping
Photoluminescence

Notes

References 11 and 13 discuss Er2O3 and Y2O3 processes.
36