Search 1555 plasma ALD publications by:
Search 1555 plasma ALD publications by:
Publication Information
Title:
Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
Type:
Journal
Info:
APPLIED PHYSICS LETTERS 87, 011907 2005
Date:
2005-07-01
Author Information
Name | Institution |
---|---|
Trinh Tu Van | University of California - Los Angeles (UCLA) |
Jane P. Chang | University of California - Los Angeles (UCLA) |
Films
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Optical Properties
Analysis: PL, PhotoLuminescence
Substrates
Si(100) |
Keywords
Optical |
Er-doping |
Photoluminescence |
Notes
References 11 and 13 discuss Er2O3 and Y2O3 processes. |
36 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |