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Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
Type:
Journal
Info:
APPLIED PHYSICS LETTERS 87, 011907 2005
Date:
2005-07-01
Author Information
| Name | Institution |
|---|---|
| Trinh Tu Van | University of California - Los Angeles (UCLA) |
| Jane P. Chang | University of California - Los Angeles (UCLA) |
Films
Plasma Er2O3
Hardware used: Custom
Er(TMHD)3, Er(THD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate
CAS#: 35733-23-4
CAS#: 7782-44-7
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Optical Properties
Analysis: PL, PhotoLuminescence
Substrates
| Si(100) |
Notes
| References 11 and 13 discuss Er2O3 and Y2O3 processes. |
| 36 |