Name

Institution

Trinh Tu Van

University of California - Los Angeles (UCLA)

Jane P. Chang

University of California - Los Angeles (UCLA)

Plasma Y₂O₃ using Custom

Deposition Temperature = 300C

Y(TMHD)₃

15632-39-0

Where to buy precursor

Oxygen, O₂

7782-44-7

Plasma Er₂O₃ using Custom

Deposition Temperature = 300C

Er(TMHD)₃

35733-23-4

Where to buy precursor

Oxygen, O₂

7782-44-7

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Optical Properties

PL, PhotoLuminescence

Unknown

Si(100)

Optical

Er-doping

Photoluminescence

References 11 and 13 discuss Er2O3 and Y2O3 processes.

36