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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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  • Surface cleaning
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Er2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Er2O3 films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
2Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
3Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
4Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
5Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
6Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement