Your search for plasma enhanced atomic layer deposition publications discussing Er2O3 films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement|
|2||Controlled erbium incorporation and photoluminescence of Er-doped Y2O3|
|3||Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure|
|4||Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition|
|5||Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals|
|6||Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides|
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