Er₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Er₂O₃ films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
2	Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
3	Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
4	Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
5	Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
6	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides

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