Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Type:
Journal
Info:
Applied Surface Science 246 (2005) 250 - 261
Date:
2004-11-04
Author Information
Name | Institution |
---|---|
Trinh Tu Van | University of California - Los Angeles (UCLA) |
Yu-Wei Chang | University of California - Los Angeles (UCLA) |
Films
Plasma Er2O3
Plasma Y2O3
Film/Plasma Properties
Characteristic: Thickness
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Surface Reactions
Analysis: QCM, Quartz Crystal Microbalance
Substrates
Si(100) |
Keywords
Reaction Mechanism |
Notes
1263 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |