Publication Information

Title:
Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
Type:
Journal
Info:
Applied Surface Science 246 (2005) 250 - 261
Date:
2004-11-04

Author Information

Name Institution
Trinh Tu VanUniversity of California - Los Angeles (UCLA)
Yu-Wei ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Er2O3


Plasma Y2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Surface Reactions
Analysis: QCM, Quartz Crystal Microbalance

Substrates

Si(100)

Keywords

Reaction Mechanism

Notes

1263