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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Where to buy tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3 CAS# 15632-39-0
tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3 CAS# 15632-39-0 is available from the following source(s):
| Number | Vendor | Region | Link |
|---|---|---|---|
| 1 | Strem Chemicals, Inc. | 🇺🇸 | Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III), 98+% (99.9%-Y) [Y(TMHD)3] |
| 2 | EpiValence | 🇬🇧 | Yttrium tetramethylheptanedionate |
| 3 | Ereztech | 🇺🇸 | 2,2,6,6-Tetramethyl-3,5-heptanedionate yttrium(III) |
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