Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Trinh Tu Van Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Trinh Tu Van returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
2Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
3Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
4Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
5Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
6Controlled erbium incorporation and photoluminescence of Er-doped Y2O3