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Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure

Type:
Journal
Info:
Journal of Applied Physics 100, 023115 (2006)
Date:
2006-05-10
DOI:
http://dx.doi.org/10.1063/1.2214299

Author Information

Name Institution
Trinh Tu VanUniversity of California - Los Angeles (UCLA)
John R. BargarSLAC National Accelerator Laboratory
Yu-Wei ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Y2O3

Hardware used: Custom
tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3
CAS#: 15632-39-0
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 350C

Plasma Er2O3

Hardware used: Custom
Er(TMHD)3, Er(THD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate
CAS#: 35733-23-4
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 350C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Characteristic: Film Structure
Analysis: EXAFS, Extended X-ray Absorption Fine Structure
Diagnostic: Synchrotron

Characteristic: Valence State
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy
Diagnostic: -

Characteristic: Coordination Symmetry
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy
Diagnostic: -

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: -

Substrates

Si(100)

Notes

1306