Publication Information

Title: Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure

Type: Journal

Info: Journal of Applied Physics 100, 023115 (2006)

Date: 2006-05-10

DOI: http://dx.doi.org/10.1063/1.2214299

Author Information

Name

Institution

University of California - Los Angeles (UCLA)

SLAC National Accelerator Laboratory

University of California - Los Angeles (UCLA)

Films

Plasma Y2O3 using Custom

Deposition Temperature = 350C

15632-39-0

7782-44-7

Plasma Er2O3 using Custom

Deposition Temperature = 350C

35733-23-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Film Structure

EXAFS, Extended X-ray Absorption Fine Structure

Synchrotron

Valence State

XANES, X-ray Absorption Near-Edge Spectroscopy

-

Coordination Symmetry

XANES, X-ray Absorption Near-Edge Spectroscopy

-

Photoluminescence

PL, PhotoLuminescence

-

Substrates

Si(100)

Keywords

Notes

1306



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