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Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
Type:
Journal
Info:
Journal of Applied Physics 100, 023115 (2006)
Date:
2006-05-10
Author Information
| Name | Institution |
|---|---|
| Trinh Tu Van | University of California - Los Angeles (UCLA) |
| John R. Bargar | SLAC National Accelerator Laboratory |
| Yu-Wei Chang | University of California - Los Angeles (UCLA) |
Films
Plasma Er2O3
Hardware used: Custom
Er(TMHD)3, Er(THD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate
CAS#: 35733-23-4
CAS#: 7782-44-7
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Film Structure
Analysis: EXAFS, Extended X-ray Absorption Fine Structure
Characteristic: Valence State
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy
Characteristic: Coordination Symmetry
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy
Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Substrates
| Si(100) |
Notes
| 1306 |