Name

Institution

Trinh Tu Van

University of California - Los Angeles (UCLA)

John R. Bargar

SLAC National Accelerator Laboratory

Yu-Wei Chang

University of California - Los Angeles (UCLA)

Plasma Y₂O₃ using Custom

Deposition Temperature = 350C

Y(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium

15632-39-0

Where to buy precursor

O₂, Oxygen

7782-44-7

Plasma Er₂O₃ using Custom

Deposition Temperature = 350C

Er(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium

35733-23-4

Where to buy precursor

O₂, Oxygen

7782-44-7

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Film Structure

EXAFS, Extended X-ray Absorption Fine Structure

Synchrotron

Valence State

XANES, X-ray Absorption Near-Edge Spectroscopy

-

Coordination Symmetry

XANES, X-ray Absorption Near-Edge Spectroscopy

-

Photoluminescence

PL, PhotoLuminescence

-

Si(100)

1306