Publication Information

Title:
Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
Type:
Journal
Info:
Journal of Applied Physics 100, 023115 (2006)
Date:
2006-05-10

Author Information

Name Institution
Trinh Tu VanUniversity of California - Los Angeles (UCLA)
John R. BargarSLAC National Accelerator Laboratory
Yu-Wei ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Y2O3


Plasma Er2O3


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Film Structure
Analysis: EXAFS, Extended X-ray Absorption Fine Structure

Characteristic: Valence State
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy

Characteristic: Coordination Symmetry
Analysis: XANES, X-ray Absorption Near-Edge Spectroscopy

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence

Substrates

Si(100)

Keywords

Notes

1306