Y(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium, CAS# 15632-39-0

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III), 98+% (99.9%-Y) [Y(TMHD)3]
2Ereztech2,2,6,6-Tetramethyl-3,5-heptanedionate yttrium(III) (99.9%-Y)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
2Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
3Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
4Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
5Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
6Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides


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