Search 1636 plasma ALD publications by:
tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3, CAS# 15632-39-0
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|3||Strem Chemicals, Inc.||🇺🇸||Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III), 98+% (99.9%-Y) [Y(TMHD)3]|
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Plasma Enhanced Atomic Layer Deposition Film Publications
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