Name

Institution

Trinh Tu Van

University of California - Los Angeles (UCLA)

J. Hoang

University of California - Los Angeles (UCLA)

R. Ostroumov

University of California - Los Angeles (UCLA)

K. L. Wang

University of California - Los Angeles (UCLA)

John R. Bargar

SLAC National Accelerator Laboratory

J. Lu

Uppsala University

H.-O. Blom

Uppsala University

Jane P. Chang

University of California - Los Angeles (UCLA)

Plasma Er:Y₂O3 using Custom Microwave Plasma

Deposition Temperature = 350C

Er(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium

35733-23-4

Where to buy precursor

Y(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium

15632-39-0

Where to buy precursor

O₂, Oxygen

7782-44-7

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

VG ESCALAB 5

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

PHI RBS-400

Microstructure

EXAFS, Extended X-ray Absorption Fine Structure

Synchrotron

Microstructure

TEM, Transmission Electron Microscope

-

Chemical Composition, Impurities

ELS, EELS, Electron Energy Loss Spectroscopy

FEI Tecnai F30ST

Photoluminescence

PL, PhotoLuminescence

Custom

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

-

Si(100)

1315