Jane P. Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jane P. Chang returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
2Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
3Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
4Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
5Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
6Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
7Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
8Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition


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