Jane P. Chang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jane P. Chang returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
2Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
3Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
4Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
5Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
6Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
7Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
8Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
9Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
10Atomic layer deposition of YMnO3 thin films