Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (42), pp 36980-36988
Date:
2017-09-17
DOI:
http://dx.doi.org/10.1021/acsami.7b08097

Author Information

Name Institution
Calvin D. PhamUniversity of California - Los Angeles (UCLA)
Jeffrey ChangUniversity of California - Los Angeles (UCLA)
Mark A. ZurbuchenUniversity of California - Los Angeles (UCLA)
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma CoOx

Hardware used: Custom Microwave Plasma
Co(TMHD)2, Co(THD)2, bis(2,2,6,6-tetramethyl-3,5-heptanedionato) cobalt(II), Cobalt dipivaloylmethanate
CAS#: 13986-53-3
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Plasma Fe2O3

Hardware used: Custom Microwave Plasma
Fe(TMHD)3, Fe(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) iron, Iron(III) dipivaloylmethanate
CAS#: 14876-47-2
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Plasma CoFe2O4

Hardware used: Custom Microwave Plasma
Co(TMHD)2, Co(THD)2, bis(2,2,6,6-tetramethyl-3,5-heptanedionato) cobalt(II), Cobalt dipivaloylmethanate
CAS#: 13986-53-3
Fe(TMHD)3, Fe(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) iron, Iron(III) dipivaloylmethanate
CAS#: 14876-47-2
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-88

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Nova

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: FEI Titan

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension ICON

Characteristic: Magnetic Properties
Analysis: MFM, Magnetic Force Microscopy
Diagnostic: Bruker Dimension ICON

Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Diagnostic: Quantum Design MPMS

Substrates

Si(001)
SrTiO3

Notes

1405