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Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (42), pp 36980-36988
Date:
2017-09-17
Author Information
| Name | Institution |
|---|---|
| Calvin D. Pham | University of California - Los Angeles (UCLA) |
| Jeffrey Chang | University of California - Los Angeles (UCLA) |
| Mark A. Zurbuchen | University of California - Los Angeles (UCLA) |
| Jane P. Chang | University of California - Los Angeles (UCLA) |
Films
Plasma CoOx
Plasma Fe2O3
Plasma CoFe2O4
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Magnetic Properties
Analysis: MFM, Magnetic Force Microscopy
Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Substrates
| Si(001) |
| SrTiO3 |
Notes
| 1405 |