The publication database currently has 1604 entries.
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200 Films Compositions
271 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
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Search 1604 plasma ALD publications by:
Search 1604 plasma ALD publications by:
Co(TMHD)2, bis(2,2,6,6-tetramethyl-3,5-heptanedionato) cobalt(II), CAS# 13986-53-3
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.