Custom Microwave Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Microwave Plasma hardware returned 19 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
2Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
3Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
4Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
5Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
6Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
7Gallium nitride thin films by microwave plasma-assisted ALD
8Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
9Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
10Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
11Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
12Atomic layer deposition of YMnO3 thin films
13Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
14A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
15Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
16Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
17Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
18Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen
19Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds