Custom Microwave Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Microwave Plasma hardware returned 9 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
2	Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
3	Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
4	Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
5	Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
6	Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
7	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
8	Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
9	Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon

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