Search Plasma ALD Publication Database By...

Publication Information

Title: Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition

Type: Journal

Info: Journal of Vacuum Science & Technology A 34, 02D101 (2016)

Date: 2015-09-18

DOI: http://dx.doi.org/10.1116/1.4932039

Author Information

Name

Institution

Tokyo University of Science

Tokyo University of Science

Tokyo University of Science

Tokyo University of Science

University of Yamanashi

University of Yamanashi

University of Yamanashi

University of Yamanashi

SST Inc.

Hirosaki University

Films

Deposition Temperature = 300C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Plasma Species

Langmuir Probe

Custom

Thickness

TEM, Transmission Electron Microscope

Unknown

Substrates

Ge

Keywords

Notes

372



Shortcuts



© 2014-2018 plasma-ald.com