Publication Information

Title: Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition

Type: Journal

Info: Chem. Mater. 2015, 27, 7282-7288

Date: 2015-08-17

DOI: http://dx.doi.org/10.1021/acs.chemmater.5b02162

Author Information

Name

Institution

University of California - Los Angeles (UCLA)

University of California - Los Angeles (UCLA)

University of California - Los Angeles (UCLA)

University of California - Los Angeles (UCLA)

Films

Deposition Temperature Range = 190-230C

142617-53-6

7782-44-7

Deposition Temperature Range = 190-230C

14876-47-2

7782-44-7

Deposition Temperature Range = 190-230C

142617-53-6

14876-47-2

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Piezoelectric properties

PFM Piezo Force Microscopy

Bruker Dimension ICON

Thickness

Ellipsometry

J.A. Woollam M-88

Thickness

SEM, Scanning Electron Microscopy

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

PANalytical Xpert PRO MRD X-ray Diffractometer

Microstructure

TEM, Transmission Electron Microscope

FEI Titan

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

FEI Titan

Magnetic Properties

SQUID, Superconducting Quantum Interference Device

Quantum Design MPMS

Substrates

Si(001)

SrTiO3

Nb:SrTiO3

Keywords

Notes

538



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