Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition

Type:
Journal
Info:
Chem. Mater. 2015, 27, 7282-7288
Date:
2015-08-17

Author Information

Name Institution
Calvin D. PhamUniversity of California - Los Angeles (UCLA)
Jeffrey ChangUniversity of California - Los Angeles (UCLA)
Mark A. ZurbuchenUniversity of California - Los Angeles (UCLA)
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Bi2O3


Plasma Fe2O3



Film/Plasma Properties

Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device

Substrates

Si(001)
SrTiO3
Nb:SrTiO3

Keywords

Notes

538