Publication Information

Title:
A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
Type:
Conference Proceedings
Info:
Materials Today: Proceedings 17 (2019) 1521–1530
Date:
2019-09-06

Author Information

Name Institution
Chanitda PrapaipongChiang Mai University
Dheerawan BoonyawanChiang Mai University
Chanchai UmongnoChiang Mai University
Supab ChoopunChiang Mai University
Pipat RuankhamChiang Mai University

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Thickness
Analysis: AFM, Atomic Force Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Wetting Angle
Analysis: Contact Angle Measurement

Substrates

Silicon
FTO, F:SnO2

Keywords

Notes

1520