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A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
Type:
Conference Proceedings
Info:
Materials Today: Proceedings 17 (2019) 1521–1530
Date:
2019-09-06
Author Information
| Name | Institution |
|---|---|
| Chanitda Prapaipong | Chiang Mai University |
| Dheerawan Boonyawan | Chiang Mai University |
| Chanchai Umongno | Chiang Mai University |
| Supab Choopun | Chiang Mai University |
| Pipat Ruankham | Chiang Mai University |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Thickness
Analysis: AFM, Atomic Force Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Wetting Angle
Analysis: Contact Angle Measurement
Substrates
| Silicon |
| FTO, F:SnO2 |
Notes
| 1520 |