J. Hoang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by J. Hoang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits|
|2||Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition|