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Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition

Type:
Journal
Info:
Journal of Applied Physics 101, 123116 (2007)
Date:
2007-05-04
DOI:
http://dx.doi.org/10.1063/1.2748629

Author Information

Name Institution
J. HoangUniversity of California - Los Angeles (UCLA)
Trinh Tu VanUniversity of California - Los Angeles (UCLA)
M. Sawkar-MathurUniversity of California - Los Angeles (UCLA)
Bram HoexEindhoven University of Technology
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
R. OstroumovUniversity of California - Los Angeles (UCLA)
K. L. WangUniversity of California - Los Angeles (UCLA)
John R. BargarSLAC National Accelerator Laboratory
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Er:Y2O3

Hardware used: Custom
Er(TMHD)3, Er(THD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate
CAS#: 35733-23-4
tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3
CAS#: 15632-39-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 350C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Optical Properties
Analysis: EXAFS, Extended X-ray Absorption Fine Structure
Diagnostic: Synchrotron

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence
Diagnostic: -

Characteristic: Optical Absorption
Analysis: CRDS, Cavity Ring-Down Spectroscopy
Diagnostic: -

Characteristic: Optical Absorption
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: -

Substrates

Hereaus Suprasil 300
SiO2

Notes

1327