K. L. Wang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. L. Wang returned 2 record(s).

Number	Title
1	Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
2	Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits