John R. Bargar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by John R. Bargar returned 3 record(s).

Number	Title
1	Er coordination in Y₂O₃ thin films studied by extended x-ray absorption fine structure
2	Optical properties of Y₂O₃ thin films doped with spatially controlled Er³⁺ by atomic layer deposition
3	Nanostructure and temperature-dependent photoluminescence of Er-doped Y₂O₃ thin films for micro-optoelectronic integrated circuits