tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)3, CAS# 15632-39-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 7 record(s).

NumberTitle
1Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
2Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
3Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
4Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
5Atomic layer deposition of YMnO3 thin films
6Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
7Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition

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