Trinh Tu Van Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Trinh Tu Van returned 6 record(s).

Number	Title
1	Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
2	Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
3	Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
4	Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
5	Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
6	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides