R. Ostroumov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Ostroumov returned 2 record(s).

Number	Title
1	Nanostructure and temperature-dependent photoluminescence of Er-doped Y₂O₃ thin films for micro-optoelectronic integrated circuits
2	Optical properties of Y₂O₃ thin films doped with spatially controlled Er³⁺ by atomic layer deposition