Er(TMHD)3, Er(THD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate, CAS# 35733-23-4

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 8 record(s).

NumberTitle
1Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
2Er coordination in Y2O3 thin films studied by extended x-ray absorption fine structure
3Controlled erbium incorporation and photoluminescence of Er-doped Y2O3
4Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
5Nanostructure and temperature-dependent photoluminescence of Er-doped Y2O3 thin films for micro-optoelectronic integrated circuits
6Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
7Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
8Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition

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