Publication Information

Title:
Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
Type:
Journal
Info:
Chem. Mater. 2015, 27, 148-156
Date:
2014-12-04

Author Information

Name Institution
Il-Kwon OhYonsei University

Films

Plasma Er2O3


Thermal Er2O3




Film/Plasma Properties

Substrates

Keywords

Notes

234