Il-Kwon Oh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Il-Kwon Oh returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
2In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
3Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
4Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
5Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
6Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
7Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition
8Very high frequency plasma reactant for atomic layer deposition
9Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
10Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors