Your search for plasma enhanced atomic layer deposition publications authored by Taehyun Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of anode morphology on the performance of thin film solid oxide fuel cell with PEALD YSZ electrolyte|
|2||Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells|
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