Publication Information

Title: Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte

Type: Journal

Info: Beilstein J. Nanotechnol. 2015, 6, 1805--1810

Date: 2015-08-09

DOI: http://dx.doi.org/10.3762/bjnano.6.184

Author Information

Name

Institution

Seoul National University

Seoul National University

Seoul National University

Korea Advanced Institute of Science and Technology

Seoul National University

Samsung Electronics Co.

Seoul National University of Science and Technology

Seoul National University

Films

Plasma YSZ using Atomic Premium CN1

Deposition Temperature = 250C

19756-04-8

329735-72-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Density

XRR, X-Ray Reflectivity

PANalytical Xpert PRO MRD X-ray Diffractometer

Microstructure

SEM, Scanning Electron Microscopy

FEI Quanta 3D FEG

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

JEOL 2100F

Substrates

AAO, Anodic Aluminum Oxide

Keywords

Notes

395



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