Surface engineering of nanoporous substrate for solid oxide fuel cells with atomic layer-deposited electrolyte

Type:
Journal
Info:
Beilstein J. Nanotechnol. 2015, 6, 1805--1810
Date:
2015-08-09
DOI:
http://dx.doi.org/10.3762/bjnano.6.184

Author Information

Name Institution
Sanghoon JiSeoul National University
Waqas Hassan TanveerSeoul National University
Wonjong YuSeoul National University
Sungmin KangKorea Advanced Institute of Science and Technology
Gu Young ChoSeoul National University
Sung Han KimSamsung Electronics Co.
Jihwan AnSeoul National University of Science and Technology
Suk Won ChaSeoul National University

Films

Plasma YSZ

Hardware used: CN1 Atomic Premium
TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide
CAS#: 19756-04-8
Where to buy precursor
Tris(methylcyclopentadienyl)yttrium(III), (MeCp)3Y
CAS#: 329735-72-0
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 3D FEG

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2100F

Substrates

AAO, Anodic Aluminum Oxide

Notes

395