Publication Information

Title:
Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
Type:
Journal
Info:
Solar Energy Materials and Solar Cells, Volume 173, 2017, Pages 111 - 119
Date:
2017-05-17

Author Information

Name Institution
Bart MaccoEindhoven University of Technology
Harm C. M. KnoopsEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
W. BeyerForschungszentrum J├╝lich
Mariadriana CreatoreEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Thermal ZnO


Other H:ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements

Characteristic: Carrier Concentration
Analysis: Hall Measurements

Characteristic: Mobility
Analysis: Hall Measurements

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Thermal Effusion
Analysis: QMS, Quadrupole Mass Spectrometer

Substrates

ZnO

Keywords

Notes

Supplement contains ZnO etch data and nice table of experimental results https://ars.els-cdn.com/content/image/1-s2.0-S0927024817302593-mmc1.pdf
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