Bart Macco Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bart Macco returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
2Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
3Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
4Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
5Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells