Bart Macco Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bart Macco returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
2Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
3Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
4Atomic layer deposition of high-mobility hydrogen-doped zinc oxide