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W. Beyer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by W. Beyer returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
2Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
3Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface