Anti-stiction coating for mechanically tunable photonic crystal devices
Type:
Journal
Info:
Optics Express, v. 26, n. 4, p. 3882--3891 (2018)
Date:
2018-01-18
Author Information
| Name | Institution |
|---|---|
| M. Petruzzella | Eindhoven University of Technology |
| Z. Zobenica | Eindhoven University of Technology |
| M. Cotrufo | Eindhoven University of Technology |
| Valerio Zardetto | Eindhoven University of Technology |
| Alfredo Mameli | Eindhoven University of Technology |
| F. Pagliano | Eindhoven University of Technology |
| S. Koelling | Eindhoven University of Technology |
| F. W. M. van Otten | Eindhoven University of Technology |
| Fred Roozeboom | Eindhoven University of Technology |
| Erwin (W.M.M.) Kessels | Eindhoven University of Technology |
| R. W. van der Heijden | Eindhoven University of Technology |
| A. Fiore | Eindhoven University of Technology |
Films
Film/Plasma Properties
Substrates
Notes
| 1202 |