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Fred Roozeboom Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fred Roozeboom returned 29 record(s).

NumberTitle
1Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
2Patterned deposition by plasma enhanced spatial atomic layer deposition
3Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
4Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
5Anti-stiction coating for mechanically tunable photonic crystal devices
6Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
7Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
8Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
9Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
10Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
11Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
12Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
13Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
14Area-Selective Atomic Layer Deposition of In2O3:H Using a ยต-Plasma Printer for Local Area Activation
15Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
16Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
17Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
18Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
19Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
20Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
21Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
22Atmospheric pressure plasma enhanced spatial ALD of silver
23Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
24Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
25Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
26Temperature study of atmospheric-pressure plasma-enhanced spatial ALD of Al2O3 using infrared and optical emission spectroscopy
27Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
28Encapsulation method for atom probe tomography analysis of nanoparticles
29Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor