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Fred Roozeboom Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fred Roozeboom returned 29 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
2Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
3Encapsulation method for atom probe tomography analysis of nanoparticles
4Anti-stiction coating for mechanically tunable photonic crystal devices
5Patterned deposition by plasma enhanced spatial atomic layer deposition
6Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
7Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
8Area-Selective Atomic Layer Deposition of In2O3:H Using a ยต-Plasma Printer for Local Area Activation
9Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
10Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
11Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
12Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
13Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
14Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
15Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
16Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
17Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
18Atmospheric pressure plasma enhanced spatial ALD of silver
19Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
20Temperature study of atmospheric-pressure plasma-enhanced spatial ALD of Al2O3 using infrared and optical emission spectroscopy
21Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
22Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
23Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
24Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
25Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
26Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
27Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
28Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
29Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma