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Anti-stiction coating for mechanically tunable photonic crystal devices

Type:
Journal
Info:
Optics Express, v. 26, n. 4, p. 3882--3891 (2018)
Date:
2018-01-18
DOI:
http://dx.doi.org/10.1364/OE.26.003882

Author Information

Name Institution
M. PetruzzellaEindhoven University of Technology
Z. ZobenicaEindhoven University of Technology
M. CotrufoEindhoven University of Technology
Valerio ZardettoEindhoven University of Technology
Alfredo MameliEindhoven University of Technology
F. PaglianoEindhoven University of Technology
S. KoellingEindhoven University of Technology
F. W. M. van OttenEindhoven University of Technology
Fred RoozeboomEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
R. W. van der HeijdenEindhoven University of Technology
A. FioreEindhoven University of Technology

Films

Plasma Al2O3

Hardware used: Unknown
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 60C

Film/Plasma Properties

Substrates

Notes

1202