Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Z. Zobenica Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Z. Zobenica returned 1 record(s).

NumberTitle
1Anti-stiction coating for mechanically tunable photonic crystal devices