Title: Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
Type: Journal
Info: J. Phys. Chem. Lett. 2015, 6, 3610-3614
Date: 2015-08-30
DOI: http://dx.doi.org/10.1021/acs.jpclett.5b01596
Name
Institution
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Eindhoven University of Technology
Tyndall National Institute, University College Cork
Eindhoven University of Technology
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
Unknown
Silicon
523
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