Koen de Peuter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Koen de Peuter returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
2Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
3Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride


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