Your search for plasma enhanced atomic layer deposition publications authored by Koen de Peuter returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers|
|2||Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time|
|3||Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
© 2014-2018 plasma-ald.com