BTBAS, bis(tert-butylamido) silane, (t-BuCNH)2SiH2, CAS# 186598-40-3

Where to buy

NumberVendorRegionLink
1Gelest🇺🇸Di(t-Butylamino)Silane
2DOCK/CHEMICALS🇩🇪Bis(tertiarybutylamino)silane
3Ereztech🇺🇸Bis(t-butylamino)silane
4Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, 97+% BTBAS
5Pegasus Chemicals🇬🇧Bis(tertbutylamino)silane
6Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
2Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
3Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
4Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
5Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
6Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
7Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
8Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
9Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
10Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
11Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
12Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
13Designing high performance precursors for atomic layer deposition of silicon oxide
14Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
15Residual stress study of thin films deposited by atomic layer deposition
16Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
17Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy