BTBAS, bis(tert-butylamido) silane, (t-BuCNH)2SiH2, CAS# 186598-40-3

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM
2EpiValence🇬🇧Bis(t-Butylamino) silane
3Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, 97+% BTBAS
4Gelest🇺🇸Di(t-Butylamino)Silane
5Ereztech🇺🇸Bis(t-butylamino)silane
6DOCK/CHEMICALS🇩🇪Bis(tertiarybutylamino)silane
7Pegasus Chemicals🇬🇧Bis(tertbutylamino)silane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
2Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
3Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
4Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
5Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
6Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
7Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
8Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
9Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
10Designing high performance precursors for atomic layer deposition of silicon oxide
11Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
12Residual stress study of thin films deposited by atomic layer deposition
13Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
14Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
15Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
16Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
17Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD