Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


BTBAS, bis(tert-butylamido) silane, (t-BuCNH)2SiH2, CAS# 186598-40-3

Where to buy

NumberVendorRegionLink
1Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, 97+% BTBAS
2Strem Chemicals, Inc.🇺🇸Bis(t-butylamino)silane, BTBAS (99.999%-Si) PURATREM
3Ereztech🇺🇸Bis(t-butylamino)silane
4Gelest🇺🇸Di(t-Butylamino)Silane
5Pegasus Chemicals🇬🇧Bis(tertbutylamino)silane
6DOCK/CHEMICALS🇩🇪Bis(tertiarybutylamino)silane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Designing high performance precursors for atomic layer deposition of silicon oxide
2Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
3Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
4Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
5Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
6Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
7Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
8Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
9Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
10Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
11Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
12Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
13Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
14Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
15Residual stress study of thin films deposited by atomic layer deposition
16Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
17Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator