Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Designing high performance precursors for atomic layer deposition of silicon oxide
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-11-21
Author Information
Name | Institution |
---|---|
Anupama Mallikarjunan | Air Products |
Films
Plasma SiO2
Plasma SiO2
Plasma SiO2
Film/Plasma Properties
Substrates
Keywords
Notes
226 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |