Title: Designing high performance precursors for atomic layer deposition of silicon oxide
Type: Journal
Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date: 2014-11-21
DOI: http://dx.doi.org/10.1116/1.4903275
Name
Institution
Air Products
Characteristic
Analysis
Diagnostic
226
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com
© 2014-2018 plasma-ald.com