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Publication Information

Title: Designing high performance precursors for atomic layer deposition of silicon oxide

Type: Journal

Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

Date: 2014-11-21

DOI: http://dx.doi.org/10.1116/1.4903275

Author Information

Name

Institution

Air Products

Films

Thermal SiO2 using Custom

Deposition Temperature = 300C

0-0-0

10028-15-6

Thermal SiO2 using Custom

Deposition Temperature = 300C

186598-40-3

10028-15-6

Thermal SiO2 using Custom

Deposition Temperature = 300C

27804-64-4

10028-15-6

Plasma SiO2 using ASM Eagle XP8

Deposition Temperature = 300C

0-0-0

7782-44-7

Plasma SiO2 using ASM Eagle XP8

Deposition Temperature = 300C

186598-40-3

7782-44-7

Plasma SiO2 using ASM Eagle XP8

Deposition Temperature = 300C

27804-64-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

226


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