di(sec-butylamino)silane (DSBAS), ((s-Bu)₂N)SiH₃, CAS# 0-0-0

Where to buy

Number	Vendor	Link
1	Ereztech	Bis-(tert-buthylamino)silane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
2	Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
3	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
4	Designing high performance precursors for atomic layer deposition of silicon oxide

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