ASM Eagle XP8 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Eagle XP8 hardware returned 5 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Combined PEALD Gate-Dielectric and In-Situ SiN Cap-Layer for Reduced Vth Shift and RDS-ON Dispersion of AlGaN/GaN HEMTs on 200 mm Si Wafer
2Combined plasma-enhanced-atomic-layer-deposition gate dielectric and in situ SiN cap layer for reduced threshold voltage shift and dynamic ON-resistance dispersion of AlGaN/GaN high electron mobility transistors on 200 mm Si substrates
3Designing high performance precursors for atomic layer deposition of silicon oxide
4Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
5Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control