Simon D. Elliott Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simon D. Elliott returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
2Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
3First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina
4Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride